Concepedia

Michael Zeuner

MZ

Statistics

Publications

22

Citations

806

H-Index

17

Active since

1995

Affiliations

Leibniz Institute of Surface Engineering(Current)

Chemnitz University of Technology

Roth and Rau (Germany)

Charles University

University of Augsburg

Michael Zeuner is an author at Leibniz Institute of Surface Engineering specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsElectrical EngineeringInstrumentationAtomic PhysicsSurface ScienceThin FilmsPlasma Physics

Publications per year

1995–2012

22

Publications

22

Sputter process diagnostics by negative ions

Michael Zeuner, H. Neumann, Jan Zalman et al. · Journal of Applied Physics · 1998 · 85 citations

Electrical Engineering, Ion Implantation, Engineering +15

Design of ion energy distributions by a broad beam ion source

Michael Zeuner, Jürgen Meichsner, H. Neumann et al. · Journal of Applied Physics · 1996 · 75 citations

Electrical Engineering, Ion Implantation, Engineering +15

Rf magnetron sputtering of polytetrafluoroethylene under various conditions

Hynek Biederman, Michael Zeuner, Jan Zalman et al. · Thin Solid Films · 2001 · 74 citations

Materials Science, Magnetism, Materials Engineering +7

Ion energy distributions in a dc biased rf discharge

Michael Zeuner, H. Neumann, Jürgen Meichsner · Journal of Applied Physics · 1997 · 69 citations

Electrical Engineering, Ion Energy Distributions, Engineering +12

Optimisation and characterisation of a TCP type RF broad beam ion source

Michael Zeuner, Frank Scholze, Bernd Dathe et al. · Surface and Coatings Technology · 2001 · 55 citations

Electrical Engineering, Engineering, Antenna +4

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