Michael Zeuner

Statistics

Publications

Citations

814

H-Index

Active since

1995

Affiliations

Leibniz Institute of Surface Engineering(Current)

Chemnitz University of Technology

Roth and Rau (Germany)

Charles University

University of Augsburg

Michael Zeuner is an author at Leibniz Institute of Surface Engineering specializing in natural sciences, materials science, and ionization processes.

Publications per year

1995–2012

Publications

Sputter process diagnostics by negative ions

Michael Zeuner, H. Neumann, Jan Zalman et al. · Journal of Applied Physics · 1998 · 85 citations

Natural Sciences, Chemistry, Materials Science +13

Design of ion energy distributions by a broad beam ion source

Michael Zeuner, Jürgen Meichsner, H. Neumann et al. · Journal of Applied Physics · 1996 · 75 citations

Natural Sciences, Chemistry, Physics +15

Rf magnetron sputtering of polytetrafluoroethylene under various conditions

Hynek Biederman, Michael Zeuner, Jan Zalman et al. · Thin Solid Films · 2001 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +10

Ion energy distributions in a dc biased rf discharge

Michael Zeuner, H. Neumann, Jürgen Meichsner · Journal of Applied Physics · 1997 · 69 citations

Natural Sciences, Electrical Engineering, Mass Spectrometric Analysis +13

Optimisation and characterisation of a TCP type RF broad beam ion source

Michael Zeuner, Frank Scholze, Bernd Dathe et al. · Surface and Coatings Technology · 2001 · 55 citations

Engineering, Electrical Engineering, Radiation Physics +2

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