Jürgen Meichsner

Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive Radio Frequency Plasmas

Julian Schulze, Aranka Derzsi, K. Dittmann et al. · Physical Review Letters · 2011 · 226 citations

Electron Density, Electrical Engineering, Sheath Edges +14

Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas

Torben Hemke, Denis Eremin, Thomas Mussenbrock et al. · Plasma Sources Science and Technology · 2012 · 86 citations · Full text

Design of ion energy distributions by a broad beam ion source

Michael Zeuner, Jürgen Meichsner, H. Neumann et al. · Journal of Applied Physics · 1996 · 75 citations

Electrical Engineering, Ion Implantation, Engineering +15

Ion energy distributions in a dc biased rf discharge

Michael Zeuner, H. Neumann, Jürgen Meichsner · Journal of Applied Physics · 1997 · 69 citations

Electrical Engineering, Ion Energy Distributions, Engineering +12

Chemical composition and bond structure of carbon-nitride films deposited by CH4/N2 dielectric barrier discharge

Abhijit Majumdar, Jan Schäfer, Puneet Mishra et al. · Surface and Coatings Technology · 2006 · 59 citations

Materials Science, Engineering, Carbon-based Material +7