Concepedia

Rf magnetron sputtering of polytetrafluoroethylene under various conditions

Hynek Biederman, Michael Zeuner, Jan Zalman, P. Bílková, D. Slavı́nská, V Stelmasuk, Alexandra Boldyreva

Thin Solid Films · 2001 · 75 citations · 15 references

DOI

Concepts

References

15

The properties of fluorocarbon films prepared by r.f. sputtering and plasma polymerization in inert and active gas

Hynek Biederman, S.M. Ojha, L. Holland · Thin Solid Films · 1977 · 92 citations

, , +16

R.F. sputtering of plastics

D.T. Morrison, T. Robertson · Thin Solid Films · 1973 · 76 citations

, , +6

Plasma Polymerization of Sputtered Poly(tetrafluoroethylene)

M. E. Ryan, J.L.C. Fonseca, S. Tasker et al. · The Journal of Physical Chemistry · 1995 · 75 citations

, , +13

Friction of sputtered PTFE films

R. Harrop, Peter Harrop · Thin Solid Films · 1969 · 66 citations

, , +12

The properties of films prepared by the rf sputtering of PTFE and plasma polymerization of some freons

Hynek Biederman · Vacuum · 1981 · 50 citations

, , +13