Publication | Closed Access
Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems
20
Citations
31
References
2014
Year
Systematic CharacterizationPhotonicsOptical MaterialsEngineeringMicrofabricationOptical PropertiesMechanical EngineeringApplied PhysicsOptomechanical SystemOptical MetrologyOptomechanicsInstrumentationMicro-optical ComponentOptical System AnalysisNanomechanical SystemsDiffractive OpticBeam Optic
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