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Removal of Small (<100-nm) Particles and Metal Contamination in Single-Wafer Cleaning Tool

Atsuro Eitoku, Rita Vos, James Snow, M. Sato, Sadao Hirae, Kazuo Nakajima, Makoto Nonomura, Masato Imai, Paul Mertens, Marc Heyns

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2003 · 14 citations · 0 references

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