Concepedia
Statistics
Publications
2
Citations
24
H-Index
Active since
2003
Affiliations
Screen(Current)
Sumitomo Dainippon Pharma (United States)
IMEC
Atsuro Eitoku is an author at Screen specializing in chemical cleaning, semiconductor devices, and wafer cleaning.
Publications per year
2003–2009
Removal of Small (<100-nm) Particles and Metal Contamination in Single-Wafer Cleaning Tool
Atsuro Eitoku, Rita Vos, James Snow et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2003 · 14 citations
Engineering, Materials Engineering, Materials Science +14
All Wet Photoresist Strip by Solvent Aerosol Spray
M. Wada, Ken‐Ichi Sano, James Snow et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2009 · 10 citations
Natural Sciences, Chemistry, Materials Science +14
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