Applied Surface Science · 2003 · 68 citations · 13 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials PhysicsSemiconductor MaterialsMetal-semiconductor ContactsMetalsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor SurfacesSilicon MaterialsContact AnnealingContact FormationSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Ceramics
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Magnetron sputtered epitaxial single-phase Ti3SiC2 thin films
J.-P. Palmquist, Ulf Jansson, T. Seppänen et al. · Applied Physics Letters · 2002 · 175 citations
Natural Sciences, Materials Engineering, Materials Science +15
Contact resistance measurements on <i>p</i>-type 6H-SiC
J. Crofton, P. A. Barnes, John R. Williams et al. · Applied Physics Letters · 1993 · 124 citations