IEEE Electron Device Letters · 1996 · 15 citations · 5 references
EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationMagnetic ActuationMagnetic ActuatorsMems ActuatorsMems DesignMicromachiningCantilever MechanicsDeflection AnalysisDeflection ControlLarge Deflection Of BeamsMagnetic MicroactuatorsMicroactuatorsMicroelectromechanical Magnetic ActuatorsResponse Time
A novel magnetically actuated cantilever microactuator which produces a large angular deflection is described. The device is a nested cantilever structure for improved sensitivity, and is fabricated entirely using a standard CMOS process. The cantilever deflects bidirectionally, and has a static deflection of more than 2.5/spl deg/. It has a response time of 25 μs and at resonance has a deflection of more than 25/spl deg/.
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Thermally actuated CMOS micromirrors
Johannes Bühler, Johannes Funk, Oliver Paul et al. · Sensors and Actuators A Physical · 1995 · 57 citations
Engineering, Electrical Engineering, Mechatronics Engineering +12