Concepedia

Johannes Funk

JF

Statistics

Publications

12

Citations

332

H-Index

11

Active since

1995

Affiliations

ETH Zurich(Current)

Board of the Swiss Federal Institutes of Technology

Delft University of Technology

Johannes Funk is an author at ETH Zurich specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical EngineeringMechatronicsMicroelectronicsMechanicsSoft RoboticsMechanical SystemsComputational MechanicsMaterial Science

Publications per year

1995–2021

12

Publications

12

SOLIDIS: a tool for microactuator simulation in 3-D

Johannes Funk, Jan G. Korvink, Johannes Bühler et al. · Journal of Microelectromechanical Systems · 1997 · 60 citations

Engineering, Engineering Software Tool, Mechanical Engineering +20

Thermally actuated CMOS micromirrors

Johannes Bühler, Johannes Funk, Oliver Paul et al. · Sensors and Actuators A Physical · 1995 · 57 citations

Engineering, Microfabrication, Applied Physics +5

Electrostatic aluminum micromirrors using double-pass metallization

Johannes Bühler, Johannes Funk, Jan G. Korvink et al. · Journal of Microelectromechanical Systems · 1997 · 51 citations

Materials Science, Materials Engineering, Engineering +15

Scaling of thermal CMOS gas flow microsensors: experiment and simulation

F. Mayer, Gian Salis, Johannes Funk et al. · 2002 · 37 citations

Engineering, Gas Sensor, Flow Cell +18

IC MEMS microtransducers

H. Baltes, O. Paul, Jan G. Korvink et al. · 2002 · 30 citations

Materials Science, Engineering, Micromachines +12

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