O. Paul

Single-chip CMOS anemometer

F. Mayer, A. Hàberli, Heiko Jacobs et al. · 2002 · 59 citations

Engineering, Measurement, Calibration +9

Surface micromachining by sacrificial aluminium etching

David Westberg, O. Paul, G. Andersson et al. · Journal of Micromechanics and Microengineering · 1996 · 54 citations

Materials Science, Materials Engineering, Chemical Engineering +13

IC MEMS microtransducers

H. Baltes, O. Paul, Jan G. Korvink et al. · 2002 · 30 citations

Materials Science, Engineering, Micromachines +12

Postbuckled micromachined square membranes under differential pressure

Torsten Kramer, O. Paul · Journal of Micromechanics and Microengineering · 2002 · 18 citations

Materials Science, Membrane Structure, Membrane Formation +15

A Novel Method to Measure Poisson's Ratio of Thin Films

V. Ziebart, O. Paul, U. Münch et al. · MRS Proceedings · 1997 · 17 citations

Materials Engineering, Materials Science, Engineering +9