U. Münch

Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

A. Schaufelbühl, N. Schneeberger, U. Münch et al. · Journal of Microelectromechanical Systems · 2001 · 96 citations

Engineering, Electrical Engineering, Heat Transfer +16

Mechanical properties of thin films from the load deflection of long clamped plates

V. Ziebart, Oliver Paul, U. Münch et al. · Journal of Microelectromechanical Systems · 1998 · 96 citations

Natural Sciences, Materials Engineering, Materials Science +17

Industrial fabrication technology for CMOS infrared sensor arrays

U. Münch, D. Jaeggi, K. Schneeberger et al. · 2002 · 33 citations

Engineering, Electrical Engineering, Materials Science +16

Micromachined CMOS calorimetric chemical sensor with on-chip low noise amplifier

Andreas Koll, A. Schaufelbühl, N. Scheeberger et al. · 1999 · 20 citations

Engineering, Chemical Engineering, Chemistry +17

A Novel Method to Measure Poisson's Ratio of Thin Films

V. Ziebart, O. Paul, U. Münch et al. · MRS Proceedings · 1997 · 17 citations

Natural Sciences, Materials Science, Physics +9