Publication | Closed Access
IC MEMS microtransducers
30
Citations
4
References
2002
Year
Unknown Venue
Materials ScienceEngineeringMicromachinesMicrofabricationMems CadMechanical EngineeringIc MemsMicroscale SystemInvited ReviewInstrumentationMicrofluidicsIc Mems MicrotransducersMicro TechnologyMicro-electromechanical SystemMicroelectronics
This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.
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