2002 · 30 citations · 4 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems ActuatorsMems DesignMems FabricationMems ModelingMems PackagingMicromachining
This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.
4
Scaling of thermal CMOS gas flow microsensors: experiment and simulation
F. Mayer, Gian Salis, Johannes Funk et al. · 2002 · 37 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
CMOS integration of a thermal pressure sensor system
A. Hàberli, Oliver Paul, P. Malcovati et al. · 2002 · 36 citations