Microelectronic Engineering · 2005 · 37 citations · 1 references
EngineeringComputer EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesVlsi DesignCmos Circuit DesignComplementary Metal-oxide-semiconductor TechnologyIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationMetal-oxide-semiconductor Field-effect Transistors3D Integrated CircuitsCircuit IntegrationCmos Fabrication ProcessesThree-dimensional Integrated Circuit LayoutThree-dimensional Integration
1
3D System Integration Technologies
Peter Ramm, Armin Klumpp, R. Merkel et al. · MRS Proceedings · 2003 · 55 citations
Engineering, Computer Engineering, Electrical Engineering +17