Low-Impedance VHF and UHF Capacitive Silicon Bulk Acoustic-Wave Resonators—Part II: Measurement and Characterization

Abstract

In this part of the paper, extensive measurement results on the resonance, frequency tuning, and temperature characteristics of the silicon bulk acoustic-wave resonators (SiBARs) that were described in Part I will be presented and justified. Bulk acoustic wave resonators, high-aspect- ratio polysilicon and single-crystal silicon (HARPSS), MEMS, micromachining, micromechanical resonators, silicon resonators.