A new damascene architecture for high-performance metal–insulator–metal capacitors integration - Concepedia

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A new damascene architecture for high-performance metal–insulator–metal capacitors integration

18

Citations

5

References

2003

Year

A. Farcy, J. Torrès, V. Arnal, M. Fayolle, H. Feldis, Fabrice Jourdan, M. Assous, J.L. Di Maria, V. Vidal

Microelectronic Engineering

Materials ScienceElectrical EngineeringNew Damascene ArchitectureEngineeringElectronic PackagingMicroelectronicsInterconnect (Integrated Circuits)

References

	Year	Citations

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