Imprint Materials for Nanoscale Devices

SOFT LITHOGRAPHY

Younan Xia, George M. Whitesides · Annual Review of Materials Science · 1998 · 4.6K citations

Engineering, Materials Engineering, Materials Science +16

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Sub-10 nm imprint lithography and applications

Stephen Y. Chou, Peter R. Krauss, Wei Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 1.1K citations

Engineering, Electrical Engineering, Materials Science +14

Recent progress in nanoimprint technology and its applications

L. Jay Guo · Journal of Physics D Applied Physics · 2004 · 726 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Mold-assisted nanolithography: A process for reliable pattern replication

J. Haisma, M.J. Verheijen, Kees van den Heuvel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 656 citations

Engineering, Materials Engineering, Materials Science +11