Concepedia
Microelectronic Engineering · 2009 · 44 citations · 13 references
Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringOxide ElectronicsE-beam EvaporationApplied PhysicsIsfet ApplicationsThin FilmsMicroelectronicsThin Film Processing
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High-κ gate dielectrics: Current status and materials properties considerations
G. D. Wilk, Robert M. Wallace, J. Anthony · Journal of Applied Physics · 2001 · 5.8K citations
Engineering, Band Gap, Semiconductor Device +16
Raman study of phase transformation of TiO2 rutile single crystal irradiated by infrared femtosecond laser
Hongjuan Ma, Jilin Yang, Ye Dai et al. · Applied Surface Science · 2007 · 337 citations
Materials Science, Engineering, Optical Properties +7
Titanium dioxide (TiO<sub>2</sub>)-based gate insulators
Stephen A. Campbell, H.-S. Kim, D. C. Gilmer et al. · IBM Journal of Research and Development · 1999 · 247 citations
Semiconductors, Materials Science, Electrical Engineering +15
Preparation and Characterization of TiO2 Thin Films by Sol-Gel Method
Md Jawaid Alam, David Cameron · Journal of Sol-Gel Science and Technology · 2002 · 150 citations
Study of Anatase to Rutile Phase Transition in Nanocrystalline Titania Films
Yahia Djaoued, Simona Bǎdilescu, P. V. Ashrit et al. · Journal of Sol-Gel Science and Technology · 2002 · 134 citations