Failure localization with active and passive voltage contrast in FIB and SEM

Microelectronic failure analysis : desk reference

Thomas W. Lee, Seshu V. Pabbisetty · Medical Entomology and Zoology · 1993 · 84 citations

Engineering, Computer Engineering, Electrical Engineering +14

Investigation of Sensitivity Improvement on Passive Voltage Contrast for Defect Isolation

Jon C. Lee, C.H. Chen, David Su et al. · Microelectronics Reliability · 2002 · 17 citations

Engineering, Electrical Engineering, Microelectronics +5

An Application of Passive Voltage Contrast (PVC) to Failure Analysis of CMOS LSIs Using Secondary Electron Collection

Akira Nishikawa, N Kato, Y. Kohno et al. · Proceedings - International Symposium for Testing and Failure Analysis · 1999 · 12 citations

Engineering, Electrical Engineering, Electronic Materials +12

Passive Voltage Contrast Technique for Rapid In-Line Characterization and Failure Isolation During Development of Deep-Submicron ASIC CMOS Technology

Victor Liang, H. Sur, Subhas Bothra · Proceedings - International Symposium for Testing and Failure Analysis · 1998 · 12 citations

Engineering, Electrical Engineering, Electronic Materials +16

A NEW TECHNIQUE TO RAPIDLY IDENTIFY LOW LEVEL GATE OXIDE LEAKAGE IN FIELD EFFECT SEMICONDUCTORS USING A SCANNING ELECTRON MICROSCOPE.

Jim Colvin · 1990 · 11 citations

Engineering, Electrical Engineering, Materials Science +17