Concepedia

N Kato

NK

14

Publications

500

Citations

12

H-Index

1978

Active since

Affiliations

Nagoya University(Current)

Japan Fine Ceramics Center

Advanced Engineering Services (Japan)

Mitsui Chemicals (Japan)

Teikyo University

N Kato is an author at Nagoya University specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsElectrical EngineeringMaterial ScienceMicrofabricationSurface ScienceMicroelectronicsNatural SciencesCrystalline Defects

Publications per year

1978–2019

14

Publications

14

Accurate measurement of the Si structure factor by the Pendellösung method

Takashi Saka, N Kato · Acta Crystallographica Section A Foundations of Crystallography · 1986 · 93 citations

X-ray Crystallography, λ Scale, Engineering +22

Side-wall damage in a transmission electron microscopy specimen of crystalline Si prepared by focused ion beam etching

N Kato, Y. Kohno, H. Saka · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 91 citations

Engineering, Electron-beam Lithography, Microscopy +18

Electron holographic characterization of electrostatic potential distributions in a transistor sample fabricated by focused ion beam

Zhouguang Wang, Tsukasa Hirayama, Katsuhiro Sasaki et al. · Applied Physics Letters · 2002 · 73 citations

Engineering, Electron-beam Lithography, Microscopy +18

Surface damage induced by focused-ion-beam milling in a Si/Si p–n junction cross-sectional specimen

Zhouguang Wang, Takeharu Kato, Tsukasa Hirayama et al. · Applied Surface Science · 2004 · 62 citations

Materials Science, Ion Implantation, Engineering +9

The measurement of the real part of anomalous scattering

N Kato · Acta Crystallographica Section A · 1978 · 32 citations

Engineering, Physics, Real Part +14

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