Correction factors for films resistivity measurement

Measurement of Sheet Resistivities with the Four-Point Probe

F. M. Smits · Bell System Technical Journal · 1958 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

Resistivity Measurements on Germanium for Transistors

L. B. Valdes · Proceedings of the IRE · 1954 · 661 citations

Engineering, Electrical Engineering, Physics +14

A planar four-probe test structure for measuring bulk resistivity

M. Buehler, W. R. Thurber · IEEE Transactions on Electron Devices · 1976 · 41 citations

Engineering, Electrical Engineering, Materials Science +17

An algorithm for computing linear four-point probe thickness correction factors

Robert A. Weller · Review of Scientific Instruments · 2001 · 38 citations

Natural Sciences, Computational Engineering, Electrical Engineering +11

An Alternative Approach to the Calculation of Four‐Probe Resistances on Nonuniform Structures

John Albers, H. L. Berkowitz · Journal of The Electrochemical Society · 1985 · 31 citations

Engineering, Electrical Engineering, Circuit Theory +11