Concepedia

A comparison of the behaviour of Si0.5Ge0.5 alloy during dry and wet oxidation

J.P. Zhang, P.L.F. Hemment, S. M. Newstead, Adrian R. Powell, T. E. Whall, E. H. C. Parker

Thin Solid Films · 1992 · 31 citations · 10 references

DOI

Concepts

References

10

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

, , +17

Oxidation studies of SiGe

F. K. LeGoues, R. Rosenberg, Tùng Lâm Nguyễn et al. · Journal of Applied Physics · 1989 · 312 citations

, , +17

Kinetics and mechanism of oxidation of SiGe: dry versus wet oxidation

F. K. LeGoues, R. Rosenberg, B.S. Meyerson · Applied Physics Letters · 1989 · 153 citations

, , +17

Effects of Ge concentration on SiGe oxidation behavior

H. K. Liou, Ping Mei, U. Gennser et al. · Applied Physics Letters · 1991 · 138 citations

, , +17

Wet oxidation of GeSi strained layers by rapid thermal processing

Deepak Kumar Nayak, K. Kamjoo, Jeannie Park et al. · Applied Physics Letters · 1990 · 117 citations

, , +17