A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching

Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 443 citations · Full text

Engineering, Structural Dynamics, Mechanical Engineering +16

Fluid density sensor based on resonance vibration

Peter Enoksson, Göran Stemme, E. Stemme · Sensors and Actuators A Physical · 1995 · 73 citations

Fluid Density Sensor, Engineering, Fluid Mechanics +6

Novel fully CMOS-compatible vacuum sensor

Oliver Paul, Henry Baltes · Sensors and Actuators A Physical · 1995 · 64 citations

Electrical Engineering, Engineering, Cmos-compatible Vacuum Sensor +6

Surface micromachining by sacrificial aluminium etching

David Westberg, O. Paul, G. Andersson et al. · Journal of Micromechanics and Microengineering · 1996 · 54 citations

Materials Science, Materials Engineering, Chemical Engineering +13

Measuring Liquid Density with a Tuning-Fork Transducer

E. Stemme, Jorgen Ekelof, Leif Nordin · IEEE Transactions on Instrumentation and Measurement · 1983 · 25 citations

Engineering, Sensors, Measurement +12