Wear at microscopic scales and light loads for MEMS applications

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording

Hsiao‐chu Tsai, David B. Bogy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 851 citations

Natural Sciences, Materials Engineering, Materials Science +14

Integrated fabrication of polysilicon mechanisms

Mehran Mehregany, K.J. Gabriel, William S. Trimmer · IEEE Transactions on Electron Devices · 1988 · 226 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

In situ friction and wear measurements in integrated polysilicon mechanisms

K.J. Gabriel, F. Behi, R. Mahadevan et al. · Sensors and Actuators A Physical · 1990 · 171 citations

Engineering, Materials Engineering, Materials Science +14

A study of three microfabricated variable-capacitance motors

Mehran Mehregany, Stephen F. Bart, Lee S. Tavrow et al. · Sensors and Actuators A Physical · 1990 · 117 citations

Engineering, Electrical Engineering, Mechanical Engineering +12