Influence of the nature of the Si substrate on nickel silicide formed from thin Ni films - Concepedia

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Influence of the nature of the Si substrate on nickel silicide formed from thin Ni films

177

Citations

13

References

1976

Year

J. O. Olowolafe, M.−A. Nicolet, J. W. Mayer

Thin Solid Films

Materials ScienceSi SubstrateEngineeringNanotechnologySilicon On InsulatorSurface ScienceApplied PhysicsSiliceneThin FilmsChemical Vapor DepositionNickel SilicideThin Film ProcessingThin Ni Films

References

	Year	Citations

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