A new, optical-lever based atomic force microscope

Abstract

A new optical-lever based atomic force microscope is described in which the cantilever scans and is accurately tracked by a scanning focused spot. It can operate at forces below one nanoNewton over image areas greater than 100 μ×100 μ. It can be combined with optical microscopes of high numerical aperture and operated with the sample and cantilever in fluids. As examples of its applications, images of living cells in Petri dishes and a 6 in. (15.24 mm) silicon wafer are included.