Concepedia

RIKEN 200 KV high current implanter for metal surface modification

Masaya Iwaki, Kiyota Yoshida, N. Sakudo, Susumu Satou

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 12 citations · 6 references

DOI

Concepts

References

6

Microwave ion source for high-current implanter

N. Sakudo, K. Tokiguchi, H. Koike et al. · Review of Scientific Instruments · 1978 · 56 citations

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Sputtering observations during binary alloy production by ion implantation

Geoffrey W. Reynolds, A.R. Knudson, C. R. Gossett · Nuclear Instruments and Methods · 1981 · 23 citations

, , +8

Surface layer characteristics of ion-implanted metals

Masaya Iwaki · Thin Solid Films · 1983 · 14 citations

, , +14

Annealing and rolling behaviors of concentration profiles of Cr and Cu implanted into mild steel

M. Iwaki, S. Namba, Katsumi Yoshida et al. · Journal of Vacuum Science and Technology · 1978 · 14 citations

, , +13

Microwave ion source for high current metal beams

N. Sakudo, K. Tokiguchi, H. Koike · Vacuum · 1984 · 13 citations

, , +8