Sputtering observations during binary alloy production by ion implantation

Treatise on Materials Science and Technology

Iain May · Metallography · 1981 · 278 citations

Natural Sciences, Materials Engineering, Materials Science +17

Model calculation of ion collection in the presence of sputtering

F. Schulz, K. Wittmaack · Radiation Effects · 1976 · 179 citations

Natural Sciences, Materials Engineering, Materials Science +13

The mechanism of simultaneous implantation and sputtering by high energy oxygen ions during secondary ion mass spectrometry (SIMS) analysis

J. C. C. Tsai, J.M. Morabito · Surface Science · 1974 · 61 citations

Natural Sciences, Chemistry, Analytical Chemistry +10

Depth distributions of implanted atoms under the influence of surface erosion and diffusion

J.P. Biersack · Radiation Effects · 1973 · 53 citations

Natural Sciences, Nuclear Engineering, Physics +16

Model calculations of profiles and dose of high dose ion implants influenced by sputtering

H. Kräutle · Nuclear Instruments and Methods · 1976 · 36 citations

Medicine, Materials Engineering, Materials Science +12