Concepedia

The mechanism of simultaneous implantation and sputtering by high energy oxygen ions during secondary ion mass spectrometry (SIMS) analysis

J. C. C. Tsai, J.M. Morabito

Surface Science · 1974 · 61 citations · 2 references

DOI

Concepts

References

2

Secondary ion emission for surface and in-depth analysis of tantalum thin films

J.M. Morabito, Ruthan Lewis · Analytical Chemistry · 1973 · 59 citations

, , +9

Primary oxygen ion implantation effects on depth profiles by secondary ion emission mass spectrometry

Ruthan Lewis, J.M. Morabito, J. C. C. Tsai · Applied Physics Letters · 1973 · 55 citations

, , +15