Model calculations of profiles and dose of high dose ion implants influenced by sputtering

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Engineering, Transmission Sputtering, Target Fabrication +21

Collection and sputtering experiments with noble gas ions

O. Almén, G. Bruce · Nuclear Instruments and Methods · 1961 · 416 citations

Engineering, Physics, Noble Gas Ions +4

Ion Implantation in Semiconductors

L. N. Large · Physics Bulletin · 1971 · 190 citations

Semiconductors, Electrical Engineering, Ion Implantation +14

Sputtering experiments in the high energy region

O. Almén, G. Bruce · Nuclear Instruments and Methods · 1961 · 177 citations

Engineering, Physics, Target Fabrication +6

Ion implantation in semiconductors

J. W. Mayer · 1973 · 92 citations

Semiconductors, Materials Engineering, Electrical Engineering +14