Thin Solid Films · 2004 · 41 citations · 14 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials ChemistryThin FilmsPorosity AnalysisPorosity CharacterizationPorosity EvaluationPorous MaterialsSurface MorphologySurface PhysicsEllipsometryMesoporosityMesoporous MaterialsMesoporous NanomaterialsPore-size DistributionPorous SilicaPorous Silica MaterialsSpectroscopic Ellipsometry
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Determination of pore size distribution in thin films by ellipsometric porosimetry
Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 509 citations
Natural Sciences, Chemical Engineering, Materials Science +17
G. Lucovsky, M. J. Mantini, J. K. Srivastava et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 395 citations