Device quality growth and characterization of (110) GaAs grown by molecular beam epitaxy

L. T. P. Allen, E. R. Weber, J. Washburn, Y.C. Pao

Applied Physics Letters · 1987 · 54 citations · 12 references

Concepts

Abstract

Device quality (110)GaAs has been reproducibly grown by molecular beam epitaxy (MBE) for the first time. Angling of the substrate to expose stable, Ga-rich ledges on the (110) surface has been shown to be the necessary condition for two-dimensional growth. The layers exhibit a room-temperature electron mobility of ∼5700 cm2/V s for NSi∼4×1015 and a strong exciton photoluminescence emission at 4 K. This breakthrough in MBE growth of III-V compounds allows for fabrication of (110) GaAs devices which will take advantage of the unique properties of this orientation.

References

12