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An investigation of contact resistance between metal electrodes and amorphous gallium–indium–zinc oxide (a-GIZO) thin-film transistors

Materials ScienceAmorphous Gallium–indium–zinc OxideElectrical EngineeringEngineeringMetal ElectrodesOxide ElectronicsApplied PhysicsGallium OxideThin Film Process TechnologyThin FilmsThin Film ProcessingContact ResistanceSemiconductor Device