Planar channeling effects in Si(100)

Monte Carlo Channeling Calculations

J. H. Barrett · Physical review. B, Solid state · 1971 · 682 citations

Natural Sciences, Physics, Computational Thermodynamics +14

Boron, fluorine, and carrier profiles for B and BF2 implants into crystalline and amorphous Si

R. G. Wilson · Journal of Applied Physics · 1983 · 173 citations

Engineering, Materials Engineering, Materials Science +17

Si(001) surface studies using high energy ion scattering

L. C. Feldman, P. J. Silvėrman, I. Stensgaard · Nuclear Instruments and Methods · 1980 · 126 citations

Natural Sciences, Materials Science, Physics +13

Residual defects following rapid thermal annealing of shallow boron and boron fluoride implants into preamorphized silicon

C. Carter, W. Maszara, D. K. Sadana et al. · Applied Physics Letters · 1984 · 104 citations

Engineering, Materials Engineering, Materials Science +17

Channeling in low energy boron ion implantation

A. E. Michel, R. H. Kastl, Sebastian Mäder et al. · Applied Physics Letters · 1984 · 95 citations

Engineering, Electrical Engineering, Electronic Materials +12