Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners

Abstract

This paper presents modeling, fabrication and characterization of two designs of two-axis gimbal-less, thin-film PZT driven micromirrors with 1mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> apertures. These micromirrors reach high frequencies for piston (21 kHz) and torsional modes (28.9 kHz) and the θ <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">opt</sub> · D product achieves up to 20.7°·mm driven by a unipolar rectangular pulse of 10 V. The combination of high frequency operation and the high driving force of the piezoelectric actuators leads to a very short reaction time. Furthermore, by combining the two adjacent torsion modes of the micromirrors circle laser beam trajectories can be realized.