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A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

DOI

86

Citations

26

References

2011

Year

Yiping Zhu, Wenjing Liu, Kemiao Jia, Wenjun Liao, Huikai Xie
Sensors and Actuators A Physical

References

YearCitations

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