Quantitative modeling of reactive sputtering process for MgO thin film deposition

Predicting thin-film stoichiometry in reactive sputtering

S. Berg, T. Larsson, C. Nender et al. · Journal of Applied Physics · 1988 · 173 citations

Materials Science, Materials Engineering, Compound Film +9

Process modeling of reactive sputtering

S. Berg, Hans‐Olof Blom, Mona Moradi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 102 citations

Electrical Engineering, Engineering, Industrial Engineering +12

Reactive sputtering using two reactive gases, experiments and computer modeling

Patrik Carlsson, C. Nender, Hana Baránková et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 68 citations

Materials Science, Chemical Engineering, Reactive Gases +11

Target and substrate surface reaction kinetics in magnetron sputtering of nitride coatings

S. Hofmann · Thin Solid Films · 1990 · 66 citations

Materials Science, Engineering, Corrosion +7

Model of d.c. magnetron reactive sputtering in ArO2 gas mixtures

A. P. Ershov, Leonid Pekker · Thin Solid Films · 1996 · 35 citations