Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing - Concepedia

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Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing

DOI Full Paper Access

161

Citations

40

References

2007

Year

Thomas P. Moffat, Daniel Wheeler, S.-K. Kim, D. Josell

Electrochimica Acta

Materials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsAdsorbate Coverage MechanismDamascene ProcessingBump Control

References

	Year	Citations

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