Transmission electron microscopy studies of the polycrystalline silicon-SiO2 interface

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Dopant segregation in polycrystalline silicon

Mohammad M. Mandurah, Krishna C. Saraswat, C. R. Helms et al. · Journal of Applied Physics · 1980 · 371 citations

Natural Sciences, Materials Science, Physics +17

Redistribution of Acceptor and Donor Impurities during Thermal Oxidation of Silicon

Andrew S. Grove, Otto Leistiko, C. T. Sah · Journal of Applied Physics · 1964 · 333 citations

Engineering, Materials Engineering, Materials Science +17

Grain Growth Mechanism of Heavily Phosphorus‐Implanted Polycrystalline Silicon

Yasuo Wada, Shigeru Nishimatsu · Journal of The Electrochemical Society · 1978 · 246 citations

Engineering, Materials Engineering, Materials Science +17

Structure and Stability of Low Pressure Chemically Vapor‐Deposited Silicon Films

T. I. Kamins, Mohammad M. Mandurah, Krishna C. Saraswat · Journal of The Electrochemical Society · 1978 · 190 citations

Natural Sciences, Materials Engineering, Materials Science +17