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Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding

Materials ScienceAdvanced Laser ProcessingEngineeringMicrofabricationFemtosecond Laser AblationApplied PhysicsLaser Processing TechnologyDeep Plasma EtchingMicro-optical ComponentMicrofluidicsPlasma EtchingMicrofluidic Glass Chips3D Printing