Microelectronic Engineering · 2003 · 17 citations · 25 references
EngineeringMaterials EngineeringMaterials ScienceActuatorsMicroelectromechanical SystemsMicrofabricationAtomic Force MicroscopyMems DesignMems FabricationMicrofabrication MaterialsNanomechanicsScanning Probe MicroscopyCantilever MechanicsMicrocantilever DesignMicrocantilever SensorsMicroscale Force Measurement
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G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text
Positioning single atoms with a scanning tunnelling microscope
D. M. Eigler, E. K. Schweizer · Nature · 1990 · 3.1K citations
7 × 7 Reconstruction on Si(111) Resolved in Real Space
G. Binnig, H. Rohrer, Ch. Gerber et al. · Physical Review Letters · 1983 · 1.9K citations · Full text
Atom probe field ion microscopy
M.K. Miller · Vacuum · 1994 · 812 citations