Publication | Closed Access
Fabrication of multiple electrodes by reverse EDM and their application in micro ECM
109
Citations
7
References
2006
Year
Micro ElectrodesEngineeringMechanical EngineeringBiomedical EngineeringMicro-electromechanical SystemMachine ToolMicro Electrochemical MachiningMicrofluidicsElectrode Reaction MechanismAbrasive MachiningMaterials ScienceMicro EcmElectrical EngineeringElectroactive MaterialTool WearStable MachiningManufacturing EngineeringElectrochemical CellMicroelectronicsElectrochemistryReverse EdmMicrofabricationMaterial MachiningMultiple Electrodes
Micro electrodes of various shapes were fabricated by reverse electrical discharge machining (REDM). The machining characteristics of REDM were investigated under varying capacitances and applied voltages, and optimal conditions for stable machining were suggested. Multiple-tipped micro electrodes fabricated by REDM were then introduced for micro electrochemical machining in order to increase productivity over single micro electrodes. By using various multiple electrodes, micro hole arrays, grooves and channels were machined on stainless steel.
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