Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle

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Jürgen Wibbeler, Günter Pfeifer, Michael Hietschold · Sensors and Actuators A Physical · 1998 · 298 citations

Engineering, Electrical Engineering, Materials Science +16

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Engineering, Biomedical Engineering, Mechanical Engineering +17

Electrically activated normally closed diaphragm valves

H. Jerman · Journal of Micromechanics and Microengineering · 1994 · 98 citations

Engineering, Mechanical Engineering, Actuators +16

Electrostatically driven gas valve with high conductance

Mitsuhiro Shikida, K. Satō, Shigehisa Tanaka et al. · Journal of Microelectromechanical Systems · 1994 · 55 citations

Engineering, Chemical Engineering, Electrical Engineering +14

A ROBUST NORMALLY-CLOSED SILICON MICROVALVE

P.W. Barth, Christopher Beatty, Leslie A. Field et al. · 1994 · 45 citations · Full text

Engineering, Electrical Engineering, Microelectronics +11