Microstructure of silicon-on-insulator structures produced by high dose nitrogen implantation of silicon

High quality silicon on insulator structures formed by the thermal redistribution of implanted nitrogen

P.L.F. Hemment, R. F. Peart, Maoqing Yao et al. · Applied Physics Letters · 1985 · 58 citations

Engineering, Materials Engineering, Materials Science +17

Transmission electron microscopy and Auger electron spectroscopy of silicon-on-insulator structures prepared by high-dose implantation of nitrogen

J. Petruzzello, Thomas McGee, M. H. Frommer et al. · Journal of Applied Physics · 1985 · 56 citations

Engineering, Materials Engineering, Materials Science +17

Formation of Silicon‐on‐Insulator Structures by Implanted Nitrogen

L. Nesbit, S. R. Stiffler, George J. Slusser et al. · Journal of The Electrochemical Society · 1985 · 43 citations

Engineering, Materials Engineering, Materials Science +16

Formation mechanism and structures of buried oxy-nitride layers produced by ion beam synthesis

KJ Reeson, P.L.F. Hemment, R.J. Chater et al. · Vacuum · 1986 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +12