Publication | Closed Access
Micropumps—past, progress and future prospects
372
Citations
52
References
2004
Year
Future ProspectsEngineeringMicromachinesMicrofabricationNanomanufacturingMicroelectromechanical SystemsBiofabricationMicromanufacturingMicroscale SystemMicromachiningMicrofluidicsMicro Technology
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