Concepedia

Atomic layer deposition of Ge2Sb2Te5 thin films

Mikko Ritala, Viljami Pore, Timo Hatanpää, Mikko Heikkilä, Markku Leskelä, Kenichiro Mizohata, A. G. Schrott, Simone Raoux, S. M. Rossnagel

Microelectronic Engineering · 2009 · 72 citations · 12 references

DOI

Concepts

References

12

Phase-change materials for rewriteable data storage

Matthias Wuttig, Noboru Yamada · Nature Materials · 2007 · 3.6K citations

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Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges

Markku Leskelä, Mikko Ritala · Angewandte Chemie International Edition · 2003 · 1.1K citations · Full text

, , +17

Phase-change random access memory: A scalable technology

Simone Raoux, Geoffrey W. Burr, M. Breitwisch et al. · IBM Journal of Research and Development · 2008 · 1K citations

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Structural transformations of Ge2Sb2Te5 films studied by electrical resistance measurements

I. Friedrich, V. Weidenhof, Walter K. Njoroge et al. · Journal of Applied Physics · 2000 · 660 citations

, , +15

Structures of stable and metastable Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>, an intermetallic compound in GeTe–Sb<sub>2</sub>Te<sub>3</sub> pseudobinary systems

Toshiyuki Matsunaga, Noboru Yamada, Yoshiki Kubota · Acta Crystallographica Section B Structural Science · 2004 · 312 citations

, , +17