Mikko Heikkilä

Atomic Layer Deposition of High‐<i>k</i> Oxides of the Group 4 Metals for Memory Applications

Jaakko Niinistö, Kaupo Kukli, Mikko Heikkilä et al. · Advanced Engineering Materials · 2009 · 137 citations

Engineering, Several High‐k Ald, Chemical Deposition +16

Atomic layer deposition of TiO2−N thin films for photocatalytic applications

Viljami Pore, Mikko Heikkilä, Mikko Ritala et al. · Journal of Photochemistry and Photobiology A Chemistry · 2005 · 130 citations

Thermal study on electrospun polyvinylpyrrolidone/ammonium metatungstate nanofibers: optimising the annealing conditions for obtaining WO3 nanofibers

Imre Miklós Szilágyi, Eero Santala, Mikko Heikkilä et al. · Journal of Thermal Analysis and Calorimetry · 2011 · 104 citations

Materials Science, Nanofiber, Engineering +9

Atomic layer deposition and characterization of vanadium oxide thin films

Timothee Blanquart, Jaakko Niinistö, Marco Gavagnin et al. · RSC Advances · 2012 · 100 citations

Thin Film Physics, Engineering, Thin Film Process Technology +16

Lithium Phosphate Thin Films Grown by Atomic Layer Deposition

Jani Hämäläinen, Jani Holopainen, Frans Munnik et al. · Journal of The Electrochemical Society · 2012 · 99 citations

Engineering, Chemistry, Chemical Deposition +20