Atomic layer deposition and characterization of vanadium oxide thin films

Timothee Blanquart, Jaakko Niinistö, Marco Gavagnin, +7

RSC Advances

Thin Film PhysicsEngineeringThin Film Process TechnologyChemistryChemical Deposition +14

Evaluation and Comparison of Novel Precursors for Atomic Layer Deposition of Nb₂O₅Thin Films

Timothee Blanquart, Jaakko Niinistö, Mikko Heikkilä, +7

Chemistry of Materials

Oxide HeterostructuresMaterials ScienceEngineeringThin-film FabricationNb2o5 Thin Films +11

Atomic Layer Deposition of Groups 4 and 5 Transition Metal Oxide Thin Films: Focus on Heteroleptic Precursors

Timothee Blanquart, Jaakko Niinistö, Mikko Ritala, +1

Chemical Vapor Deposition

Materials ScienceMaterials EngineeringAluminium NitrideTransition Metal ChalcogenidesEngineering +13

Heteroleptic Cyclopentadienyl-Amidinate Precursors for Atomic Layer Deposition (ALD) of Y, Pr, Gd, and Dy Oxide Thin Films

Sanni Seppälä, Jaakko Niinistö, Timothee Blanquart, +7

Chemistry of Materials

Materials ScienceOxide HeterostructuresOxygen SourceOxygen SourcesEngineering +13

Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO₂

Timothee Blanquart, Jaakko Niinistö, Marco Gavagnin, +5

Chemistry of Materials

Materials ScienceEngineeringNanotechnologyTitanium BisSurface Science +10

[Zr(NEtMe)₂(guan-NEtMe)₂] as a Novel Atomic Layer Deposition Precursor: ZrO₂Film Growth and Mechanistic Studies

Timothee Blanquart, Jaakko Niinistö, Nabeel Aslam, +11

Chemistry of Materials

Materials ScienceChemical EngineeringMechanistic StudiesEngineeringNanotechnology +12

Optical and Dielectric Characterization of Atomic Layer Deposited Nb2O5 Thin Films

Timothee Blanquart, Kaupo Kukli, Jaakko Niinistö, +4

ECS Solid State Letters

Influence of growth and annealing temperatures on the electrical properties of Nb₂O₅-based MIM capacitors

H. García, Helena Castán, E. Pérez, +7

Semiconductor Science and Technology

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringOxide Electronics +13

Atomic Layer Deposition, Characterization, and Growth Mechanistic Studies of TiO₂ Thin Films

Mikko Kaipio, Timothee Blanquart, Yoann Tomczak, +9

Langmuir

Thin Film PhysicsExcellent Growth RateEngineeringInorganic PhotochemistryOxidation Resistance +21

Cyclopentadienyl Precursors for the Atomic Layer Deposition of Erbium Oxide Thin Films

Timothee Blanquart, Mikko Kaipio, Jaakko Niinistö, +8

Chemical Vapor Deposition

EngineeringAtmospheric PhotochemistryChemistryChemical DepositionApplied Chemistry +14