Concepedia

Sanni Seppälä

SS

4

Publications

86

Citations

4

H-Index

2016

Active since

Affiliations

University of Helsinki(Current)

Helsinki Institute of Physics

Sanni Seppälä is an author at University of Helsinki specializing in chemistry, thin films, and engineering.

Top concepts

ChemistryThin FilmsEngineeringSurface ScienceMaterial ScienceNanotechnologyNanomaterialsApplied PhysicsOptical MaterialsInorganic Chemistry

Publications per year

2016–2019

4

Publications

4

Heteroleptic Cyclopentadienyl-Amidinate Precursors for Atomic Layer Deposition (ALD) of Y, Pr, Gd, and Dy Oxide Thin Films

Sanni Seppälä, Jaakko Niinistö, Timothee Blanquart et al. · Chemistry of Materials · 2016 · 32 citations

Materials Science, Oxide Heterostructures, Oxygen Source +15

Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

Jere Tupala, Marianna Kemell, Miika Mattinen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 28 citations · Full text

Materials Science, Ald Growth Rate, Engineering +12

Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

Sanni Seppälä, Jaakko Niinistö, Miika Mattinen et al. · Thin Solid Films · 2018 · 16 citations · Full text

Materials Science, Inorganic Chemistry, Oxygen Source +15

Comparative study on the use of novel heteroleptic cyclopentadienyl-based zirconium precursors with H2O and O3 for atomic layer deposition of ZrO2

Sanni Seppälä, Marko Vehkamäki, Kenichiro Mizohata et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 10 citations · Full text

Rows per page

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