Publication | Closed Access

The influence of chemical treatments on tungsten films found in integrated circuits

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringApplied PhysicsTungsten FilmsSemiconductor Device FabricationIntegrated CircuitsChemical TreatmentsThin FilmsChemical DepositionMicroelectronicsThin Film Process TechnologyChemical Vapor DepositionThin Film Processing