Concepedia

Publication | Closed Access

Characterization of phosphorus implantation in 4H-SiC

DOI

52

Citations

11

References

1999

Year

V. Khemka, R. N. Patel, N. Ramungul, T. Paul Chow, M. Ghezzo, J. Kretchmer
Journal of Electronic Materials

References

YearCitations

Page 1